| The manufacture technology of micro-optical components including ultra-precision, compression molding technology. Compression molding technology is a low cost technology for mass production as a kind of replication technology. Whether micro-optical components are manufactured by ultra-precision machining directly or micro mould for compression molding, which surfaces all require subsequent finishing to further improve surface quality and form accuracy to meet application requirements.Magnetorheological Finishing Technology (MRF) is a new type of developed flexible processing technology with easy control, removal function stable, no subsurface damage characteristics and so on. This paper presents inclined Magnetorheological Finishing Technology process to realize micro-optical components (belowΦ10mm) finishing based on micro-optical components and micro moulds finishing integrating with MRF Technology.This research is supported by the NSFC, the National High Technology Research and Development Program, National Project of Scientific and Technical Supporting Programs. In this paper, study was carried out based on inclined Magneto-rheological Finishing Technology as following:(1)This paper summarizes the theory and theory model of MRF from the basic principle of MRF and the related literature. Inclined MRF process was researched for micro-optical components and micro mould finishing based on characteristics of micro-optical components and moulds machining and MRF finishing.(2)Inclined MRF device was developed based on the characteristics of micro-optical components and micro moulds machining and MRF finishing principle. The layout of overall structure, power element design, circulation system design and structure of magetic finishing tool for micto-optical components and micro moulds finishing were described in detail. And tool path was planned for inclined MRF of micro-aspheric based on the effect of the tool path on the finishing surface.(3)The effects of the composing components of the MRF fluid on stability, rheology, discreteness and finishing performance were analysised based on MRF fluid characteristics. Then according to the results of the analysis, the proportion of the components was determined and high quality MRF fluid was configured. Process tests were carried out using the developed MRF fluid, and good results were obtained.(4)Process tests were conducted with K9 optical glass, micro-aspherical of exploited copper, micro-aspheric of tungsten carbide mould and micro-aspheric single crystal silicon optical element using inclined MRF device and developed MRF fluid. The surface roughness of the K9 optical glass got good result. The surface qualities and form accuracy of micro-aspherical of exploited copper, micro-aspheric of tungsten carbide mould and micro-aspheric single crystal silicon optical element were both improved.
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