Development Of A Fast Tool Servo System Which Based On Piezoelectric Ceramic

Since fee curved surface of micro-optics element has a very complex shape has a very high accuracy required, the traditional manufacture is difficult to meet the performance requirements of micro-optics element However, the Fast Tool Servo (FTS) system can manufacture these surfaces and structures high efficiently and qualitatively, because it has a high frequency response, ultra-precision and it can control the tools tracking the workpiece surface’s change with the angle feedback of the spindle motor.In this paper, according to the characteristics of FTS, it has designed a Fast Tool Servo (FTS) device which with a high precision positioning platform and the FTS was driven by piezoelectric ceramic. The FTS device designed by this paper has used for processing experiment to verify its functioa The main contents are expressed as follow:1、By using the method of theoretical analysis and finite element analysis, designed a Fast Tool Servo (FTS) device which based on piezoelectric ceramic and jointed by flexible hinge. The device was required to reach a travel range for60um; and its frequency response should reach150Hz within39μm travel range.2、The FTS system is designed and built up. Then, the performances of whole system are tested Testing results indicate that the performances of FTS system can satisfy the designing requirements.3、Design a high precision positioning platform, which used for installing FTS device. It required the micro-platform has a travel range for55μm which used for compensating the positioning error. A series of testing indicate that the platform can meet the requirement4、In order to testify the FTS device can use for micro-optics manufacturing, to build an experimental platform for processing experiment...