Analysis And Test Of Electostatic Control Acceleration Micro-switch Based On MEMS

MEMS Acceleration switch is an inertial device which integrates functions of sensing, judging and actuating. It not only senses acceleration but also performs on-off functions under the effects of the threshold forces.According to working principle of acceleration switch, established Static Electricity control micro-acceleration switch models. Based on a micro-switch models, a inertia switch with threshold is designed, and a dynamic model of the micro-switch is set up, which is coupled several forces, such as electric field forces, damping force, inertial force, elastic force and the Casimir force. The structure of the switch consists of cantilever, the inertial mass block supported by the cantilever. Threshold Analysis by COMSOL Multiphysics is 23.6g. The threshold of the switch tested by centrifuge is 24g, the deviation is only 1.6%, and the response time is 5.32 ms.