Research On Transient Cutting Temperature Test Based On Multilayer Thin Film Thermocouple

The paper is in the field of cutting temperature measurement, which is under the support of Natural Science Foundation of Liaoning Province (No.20062143) and Plan for Scientific and Technological Industry in Colleges and Universities of Liaoning Education Department. (No.05L023).The cutting temperature measurement and control is important issues of cutting research and production in the cutting mechanism, and it has a rapid change, difficult to achieve real-time measurement at the same time. To solve this problem, this paper developed a multi-layer composite cutting thermocouple temperature sensor, which integrates both cutting and temperature measuring functions, can quickly and accurately measure tip department temperature of the cutting tool.This paper contains:structure optimized design of the TFTC temperature sensor, the fabrication method for SiO2 insulating coating, thermocouples thin-film by the magnetron sputtering, static and dynamic calibration, cutting tests and so on. Among these, the manufacturing of SiO2 insulating coating, thin-film electrodes, the characteristic of thermocouple film are the key project and have been emphasized in this paper.Compared with microwave electro cyclotron resonance (MW-ECR) plasma source magnetron sputtering technique, the thin-films of thermocouple which are developed by DC magnetron sputtering can reduce the coating cycle and save the cost of experiments effectively.The thin films are dense and smooth, the components are close to the target, and the depth of TFTC is only 1.266μm. Static and dynamic calibration are carried out, the sensitivity of thin-film thermocouple is 67.4μV/℃, linearity error is less than 0.32%,the minimum time constant is 0.042ms. The dynamic calibration which adopts Ultra-CFR short-pulse laser as the excitation sources of heat, obtain energy on the surface from the laser comparing to transient high temperature of the dynamic characteristics of thin-film thermocouple. The heat transfers within the way to the film and outputs the voltage signal. The results show that the sensor has good dynamic responsibility, can achieve microsecond time constant. Finally, aluminum cutting tests are carried out with the thin-film thermocouple temperature sensor.