Fabrication Of Tools With Built-in Thin Film Thermocouple Sensors

The paper is in the field of cutting temperature measurement, which is under the support of Natural Science Foundation of LiaoNing Province(No.20062143) and Plan for Scientific and Technological Industry in Colleges and Universities of LiaoNing Educarion Department. (No.05L023). The present work dedicaes to the development of tempreture sensor——Fabrication and Characterization of Tools with built-in thin film thermocouple sensors.Cutting temperature directly impact the thermal deformation of workpiece, the quality of processed surface, the area cutter knife before the debris generation and tumor regression, as well as a number of factors, so modern manufacturing industry gradually increase the requirements of monitoring cutting the temperature. In the process of high-speed cutting of aluminum alloy bring a large amount of heat, as the cutting speed is too high, cutting heat has not enough time to take away by the outflow of high-speed chip, a little temperature has been accumulated on the workpiece, and almostly maintain room tempetature. Cutting heat concentrated in the tip, and cutting jobs in the region are buried, in a state of semi-closed, the conventional method of temperature measurement can not touch on the cover of the region. This paper developed tools with built-in thin film thermocouple sensors, which intgrates botll cutting and temperature measuring functions , can quickly and accurately measuring the cutting tool tip Department temperature.This paper contains: structure optimized design of the TFTC tempreture sensor, the fabrication method for SiO₂ insulating coating, thermocouples thin-film by the Magnetron Spurting, static calibration, dynamical calibration, error analysis of dynamical cutting tempreture, the thermocouple film abrading error analysis and so on. Among these, the manufacturing of SiO₂ insulating coating, thin-film electrodes, the thermocouple film abrading error analysis are the key project and have been emphasized in this paper.By increasing the RF bias voltage of magnetron sputtering, the bonding between thin-film thermocouple and substrate has been improved. The mask made by the numerical controlled linear cutting machine, which has regular shape and small thermal deformation. The thermocouple film made by magnetron sputtering has compactive and smooth thickness, clear boundary, continuous even the size reduced 70%. The static and dynamic calibration of TFT-C are proposed, and it is concluded that the sensitivity are 66.9μV/℃, linear error is no greater than 0.45% . Through using two kinds of laser as heat source, the experiment has got first-order system step response and impulse response respectively, the thermocouple response time close to 0.25ms. In order to research the process of the thermocouple wear out,four kinds of hot node width has been made to simulate the process, the results demonstrate that the heat node width made a little influence to the static and dynamic data,so we can say that the thermocouple Wear and tear will not affect its accuracy and response time.