Research On Multi-DOF Micro-manipulation Platform Based On PZT And Its Measurement & Control Technology

According to the requirements of micro-manipulation technology for micro-nano and biomedical field, a kind of 5-DOF micro-manipulation platform based on PZT and its measurement & control technology were studied in this dissertation. On the basis of designing the 5-DOF platform's mechanical ontology and studying on the piezoelectric ceramics's hysteresis model, a high-performance digital multi-channel controller was developed using PXI bus as bridge module, DSP & FPGA as central control unit by means of modular design strategy. Thereafter, a prototype system of 5-DOF micro-manipulation platform based on PZT was developed and experiments were carried out. The feasibility and effectiveness of the relevant system and technologies were proved by experimental results. The details of this dissertation were presented as below:Chapter 1:The significance of researching on high-precision multi-DOF micro-manipulation system was introduced. Meanwhile, the research status, development trend of micro-manipulation system and relevant technologies were summarized. Finally, the research content of this dissertation was presented and each chapter of this dissertation was arranged.Chapter 2:A kind of 5-DOF micro-manipulation platform's mechanical ontology was constructed on the basis of designing the 2-DOF & 3-DOF platform. Thereafter, the structure and principle of this platform were analysed, focusing on dynamic and static characteristics. The feasibility of the scheme was proved by finite element analysis.Chapter 3:By comparing with many hysteresis models of piezoelectric ceramics, Preisach model was chosen and illustrated. After that, bilinear interpolation, neural network and support vector machine (SVM) were combined with Preisach model in order to describe the hysteresis models, and then the piezoelectric actuator was controlled effectively.Chapter 4:According to the features above micro-manipulation platform, the measurement & control technology was studied. And a kind of high-performance digital multi-channel controller for this micro-manipulation platform was developed using PXI bus as bridge module, DSP & FPGA as central control unit by means of modular design strategy.Chapter 5:A prototype system of 5-DOF micro-manipulation platform was developed by integrating above designed modules, and some experiments using the prototype system were carried out. The feasibility and effectiveness of the relevant system and technologies were proved by experimental results.Chapter 6:The main conclusions of this dissertation were summarized and the prospect for the micro-manipulation platform was put forward.