Research On Macro-micro Precision Rotation System Based On The Straight Cylindrical Type Flexible Hinge

Precision and ultra precision processing and detecting device is the need of the rapid development of science and technology.Macro-micro precision positioning system is favored,because of its outstanding advantages,such as large displacement,high precision,stability and so on.At home and abroad,research on the macro-micro precision rotary feed is still very little,Study about macro-micro precision rotary feed systemin this paper has certain theoretical and practical application value.Firstly,the characteristics of the piezoelectric actuators are studied and solutions about its existing problems in using are proposed.Then,based on the principle of flexible hinge and piezoelectric actuators,motion conversion mechanism is designed which can converse linear motion to rotation motion accurately.The input and output relationship of the conversion mechanism is analyzed and experiment is conducted to verify the theoretical calculation,The deformation and stress of conversion mechanism is analyzed with statics.Then strength check is conducted through finite element software ABAQUS.Next,the key components of the system,such as torque motor,cross roller bearings and circular grating are selected,Important components,such as a turntable,fittings and shell body,etc.are designed to verify the size of the structure.Finally,the the input and output relationship of the system is simulated by SIMULINK to verify that the macro-micro drive system can reach highacer positioning accuracy and repeatability than conventional rotary system.Macro-micro rotation feed system not only can be used as arotary table in precisionmachining but also well used in precision measurement and precision location device which has rotation feed.The Macro-micro drive rotary system studied in this paper improve the research of macro-micro technology in some exetent.