| In this dissertation, the micro-positioning system actuated by piezo-ceramic has been studied. A two degrees micro stage, which uses flexure hinge, has been designed by using Finite Element Analysis.The Preisach model of the piezo-ceramic has been founded. Some methods of control based on Preisach model in micro-positioning system have been studied. Several kinds of control are introduced.In chapter 1 ,the aims of the thesis are presented. First, the significance and urgency of the research on micro-positioning system are expounded. Second, every component of the system are discussed and compared. Third, the present research situation on micro-stage at home and abroad is surveyed. Finally, the main content of the dissertation is addressed.In chapter 2, a two degrees micro stage is designed. First, the flexure hinge is theoretically investigated. Second, the structure of stage is discussed. On basis of the former research, a micro stage is designed. Finally, Finite Element Analysis studies the characteristic of the stage.In chapter 3, based on theoretical research of the actuation mechanism, the characteristic of the WSYD and WTDS actuators are tested.In chapter 4, the polarization mechanism and the hysteresis nonlinearity of the piezo-ceramic are discussed. Some kinds of models of hysteresis in piezo-ceramic are introduced and compared. The Preisach model of hysteresis in piezo-ceramic is set up.In chapter 5, an experiment system of the micro-positioning system is developed and tested.In chapter 6, first, the model of the micro-positioning system is founded. Second, the open-loop control based on the Preisach model and the feedback PID control and the feedback PID control combined feed-forward based on the Preisach model are studied. Fuzzy control and adaptive inverse control using in the micro-positioning system are introduced.In chapter 7, main achievements of the dissertation are summarized and the further research work is put forward.
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