Design And Investigation Of Micro-positioning Piezo-stage System

Micro-nano positioning technology is a key technology for modern high-tech and modern industry. In precision manufacturing, ultra-precision measurement and micro-manipulation have been widely used in many fields. In recent years, with the development of modern science technology and industry, micro-nano positioning technology is required to be large stroke, high precision and small size. What’s more, positioning accuracy and resolution have required to achieve the nanoscale, Micro-nano positioning technology levels reflect a country’s technological development and overall strength. Develop micro-nano conducted positioning technology related research. To promote the rapid development of China’s advanced manufacturing, ultra-precision machining and measurement, defense industry and other high-tech industry has a significant and far-reaching significance.Paper is on the basis of reviewing systems on micro-nano positioning stage research and application status. Theoretical analysis and simulation studies are to start a two-dimensional aspects of the focus on micro-nano positioning stage design and analysis, system construction, etc.First determine the two-dimensional micro-nano positioning platform to drive the piezoelectric ceramic, flexible hinge for the implementing agency, the use of the overall design capacitive displacement sensor and PID control. Using Solidworks 3D modeling platform on micro-nano positioning.which are analyzed and calculated from the positioning platform stiffness, displacement and natural frequency from the output the key parameters. Determine the dimensions of the micro-nano positioning stage on this basis, and finite element simulation statics.Then analyzes the principle of piezoelectric ceramic,for capacitance characteristics of piezoelectric actuators, hysteresis, creep properties, nonlinear and temperature characteristics are analyzed theoretically. A mathematical model of piezoelectric actuators is built,determine the piezoelectric actuator transfer function,use PID control method to control piezoelectric actuators,then the simulation curve is obtained,demonstrating the effectiveness of the control method.Finally, a mathematical model of micro-nano positioning stage system is built, which determines the transfer function of the PZT micro-nano positioning stage system.Use ADAMS and Matlab to make a joint simulation, calculate the output displacement error and Phase difference.