Research On The Key Technology Of High-precision Two-dimentional Stage

Mechanical manufacturing industry is the foundation of a country's economic development, with the continuous development of high technology, precision and ultra-precision processing technology has developed into mechanical manufacturing industry in important aspects. Therefore, precision and ultra-precision processing technology level will represent a national advanced manufacturing technology level, and improve the precision and ultra-precision processing technology level will ascend a national defense capability, it is strong and economic power means of competition.In precision and ultra-precision processing technology areas, precision positioning technology has gradually developed into one of the key technology in this field, the stage positioning accuracy of will directly determine the precise and ultra-precision processing equipment processing precision. Therefore, this paper researches on the high precision two-dimensional stage. The key technology of high precision stage mainly include oriented technology, drive technology, control technology and detection technology, etc, this paper mainly choose drive technology and control technology of this two respects of key technology to research the two-dimensional stage.This paper adopts direct drive technology. Use permanent magnetic synchronous linear motor as the two-dimensional stage driver source.This paper first introduces the basic principle of linear motor and classification and structure of permanent magnetic synchronous linear motor,then analysis the mathematical modeling.So it can provides theory basis for the control permanent magnetic synchronous linear motor.Based on the PMAC card, this paper uses full closed-loop digital control modle for the system. The position servo control system includs feedback element and servo driver, feedback element uses high resolution linear grating, full closed-loop includs position loop, velocity loop and current loop. This paper mainly research on the composite control algorithm provided by PMAC. The algorithm is PID+velocity/ acceleration feed-forward+notch filter.Through the operational software of PMAC, this paper mainly modulates the parameters of control system, includs PID parameters and velocity/acceleration feed-forward parameters. After modulating, make the whole system obtain good transient performance and steady state performance. Then test the stage about the positioning accuracy and repeat positioning accuracy to validate its position precision.Finally, based on PMAC software programming function, simplely introducting programming grammar,and writing grammar structure. Then write simple exercise program, collect data and observe trajectory curve.