NdFeB Thin Film Preparation And Properties Study

NdFeB permanent magnet with excellent magnetic properties and commercial value, Widely used in electronics, information, communication and other industries, And the permanent magnet NdFeB permanent magnet thin film is now a research focus areas ,It Have Potentially huge economic and academic significance. However , because of technics and other aspects of the imperfect ,the actual is still have a big gap to the theoretical values of magnetic propertiesFirst, this paper made a brief introduction for the recent development of rare earth permanent magnet films, Including thin film deposition, annealing and other aspects.In this paper,the NdFeB magnet thin films was prepared by DC magnetron sputtering. First, using a variety of different parameters of preparation of thin film sputtering, By scanning electron microscopy (SEM) analysis of the different sputtering power, Ar pressure and other parameters on the microstructure of thin films; Secondly, studied samples's morphology of different sputtering power after annealing crystallization,Use X-ray diffraction (XRD) studied the sputtering power's influence on the crystallization of thin films,and discoveried at low temperature,the nanoparticles Condensation phenomena in NdFeB films .Finally,use vibrating sample magnetometer (VSM) test samples of the magnetic properties, Drawn sputtering power, Ar pressure, annealing temperature and other Parameters's influence on the films's magnetic properties ,The main conclusions of this paper are obtained:1. In experiments, The thin film's preparation use three different sputtering power of 30w, 60w, 100w, found that the 30w sputtering sample have uniform grain size and Closely arranged;and The 100w sputtering sample appear some large island grain on surface,The grain's size is larger difference to the overall grain2. Found that the uniformity of thin film have huge impact to its crystallization. In the contrast of the three different samples that after 550℃vacuum annealed and separately is 30w, 60w, 100w sputtering, 30w sputtering sample have the best crystallization and obvious Nd2Fe14B characteristic peak3. film crystallization began at 550℃,and the condensation phenomenon of floc's nanoparticles were be found in 30w,60w samples4.Of the different annealing temperature (550℃, 600℃, 650℃, 700℃, 750℃) the magnetic properties after crystallization differences, The results show, The sample crystallized by 650℃annealed has the highest Comprehensive magnetic, The sample crystallized by 700℃annealed with the highest remanence ratio, However, Saturation magnetic intensity, remanence, coercivity decreased.and compared with 550℃and 600℃samples after annealed, That the latter can be a great leap of magnetic, shows that This films were began crystallized in the temperature range5. Different sputtering power (40w, 60w, 80w) samples were prepared and tested the magnetic properties after annealing crystallization,Found that the 40w sample have best Magnetic properties, With the Sputtering power increased, magnetic properties decreased. This shows that, the Poor organization result from Sputtering power factors will lead to magnetic properties decline after annealing6. Use Different sputtering pressure (0.5mpa, 1.0mpa, 1.5pa, 2.0pa) Prepared samples, analysis After annealing at 650℃, Found that 0.5pa and 1.0pa samples prepared with good magnetic properties, The pressure to increase the magnetic properties of sample deterioration.