Study On NdFeB Series Rare Earth Thin Films Prepared By The Means Of Orientated Deposition And Their Magnetic Properties

The affects of the sputtering technics (sputtering power etc.) and thin films appearances (its composition especially the content of Nd, B and the thin films' thickness etc.) on NdFeB series' permanent magnetric thin films were researched mainly. Thought the comparation of the films' coercive force and square ration of the direction parallel and vertical to the growing direction of NdFeB thin films, we can get the best sputtering technics and films' appearances. The properties of thin films were characterized by several analysis techniques, such as AFM, VSM, XRD, TEM and so on. From the films AFM patterns, we can know when the substrating temperature is 400°C, most of the crystal is huge and get altitudinal differences. When it is 600°C, both crystal size and hight turn great. It becomes worse again at 700°C.By comparing NdFeB thin films surface and magnetic properties which were as-deposited, we can analyse the influences of depositing temperature and substation on thin films' properties. Analysing XRD patterns of films prepared in different depositing temperature, we can see that when the temperature is 100°C, only <105> and <006> direction heave a bit, the film growth orientatioin isn't clear. When the temperature increases to 200°C, films appear to be with random orientation , c axis orientation is indefinite, which is bad for films PMA. As to 300°C, thin films are with visible preferred orientatioin, and peaks at <004> and <006> are sharp, which is good for films' PMA whose c axis is vertical to thin films' surface. And when the temperature increase to 400°C, it turns to be worse.To acquire NdFeB series thin films of good magnetic properties, orientated deposition techniques were used to make surface of thin films form orientated columnar crystals, and the mechanisms of good magnetic properties was explained. NdFeB/X/Ti thin films were deposited by DC and RF magnetron sputtering techniques. The properties of thin films were characterized by several analysis techniques, such as AFM, VSM, XRD, TEM and so on. The results show that NdFeB/Ti thin films prepared by orientated deposition techniques were crystalline, because orientated deposition techniques are that...