Research On Topology Optimization And Integrated Colsed-Loop Control Of Micro-Displacement Positioning Stage

The technique of precision positioning, which is acted by the PZT and guided by the Flexure hinge, has a significant development in some fields, such as precision positioning, precision machine tools, STM, bio-engineering and medicine. In this paper, topology optimization has been applied in the stage design to solve the defects, oversize volume, small output and poor displacement coupling. Combined with the capacitive comb sensor, the precision positioning system can achieve large stroke, high precision and high integration.This paper has discussed and studied the theory of the topology optimization, and the multi-objective theory has been applied in the topology optimization to solve the defects of nano-positioning stage. Through the numerical analysis method, the optimal parameters have been obtained for the establishment of multi-objective topology optimization mathematical model. To improve the stage performance of structure and kinematics, programs have been compiled. Combined with the simulation analysis, it confirms that there are some improvements and optimization in the static and dynamic characteristics of nano-positioning stage.A high integration, high sensitivity micro-displacement capacitor comb sensor has been designed and modeled. Through the sensor failure analysis, sensor performance has been improved, combined with process improvements. The main process has been introduced and process flows has been given. Through the simulation analysis and TEM experiment, the mechanical and electrical properties of comb sensor have been validated. Finally, PCB has been drawn and the comb sensor has been integrated.The control system, based on fuzzy control, had been established. Compared with the traditional PID control algorithm, the novel control method is fit for the nano-positioning stage, which is acted by the PZT and guided by the Flexure hinge, especially in the aspects, such as to improve the response time, to maintain steady-state values, and to reduce crawl time.Through the tests for the performance of nano-positioning stage, the flexibility and effectiveness of topology optimization has been verified. The high precision and sensitivity of the comb sensor has been validated through the theory and experiment. Finally, the repeat location accuracy and system steady time have been tested, and it proves that the designed system meets the design objectives and requirements. In this paper, a useful attempt has been applied in the MEMS micro-positioning stage and micro-displacement sensor, and it provides a contribution in the miniaturization and integration of precision positioning.