Design Of Multi - Layer Nested X - Ray Grazing Incident Optical System

X-ray grazing incidence optical system plays an irreplaceable role in space astronomical observation, space weather detection, positioning and navigation, microscopic imaging, projection lithography, imaging and diagnosis technology directions. Nested X-ray grazing incidence optical system can provide larger photon collecting areas, higher angular resolution and lighter system weight. With the increasing maturity of optical processing and testing technology, it is possible to develop higher accurate X-ray grazing incidence optical systems.This article mainly studies the design of X-ray grazing incidence optical system. At the same time, to improve photon collecting areas, a design scheme was proposed in this paper. First of all, the paper describes the research progress of grazing incidence optical system, analyses the types of X-ray imaging optical system. Then working principle, structure and optical properties of grazing incidence optical system were studied, finally two kinds of structure forms of grazing incidence were chosen. That is parabolic mirror reflecting once and Wolter I system. To improve collecting areas, many nested shells of grazing incidence mirror system was proposed. Effective collecting areas are related to the geometry collecting areas and reflectivity. Finally, the design process of X-ray grazing incidence optical system has been carried on the detailed theoretical derivation, and the ZEMAX software is used to design the system. In the end, a grazing incidence optical system with 1.25° best average grazing incident angle and 1150mm focal length was obtained.The design of nested shells grazing incidence optical system meets the requirements of technical indicators. And the result of the tolerance analysis shows that the design of optical system meets the requirement.