Preparation, Microstructure And Properties Of F-doped SnO₂ Low Emission Thin Films By CVD And Industrialization Research Of Low Emission Coating Glass

In this paper a comprehensive introduction of energy saving coating glasses, especially low emission(Low-E) coating glass has been given including the development, energy saving characteristic, types and preparation methods, it shows that highly doped wide energy gap semiconductors^.g. SnCh) has promising prospects as the film material of economical energy saving coating glass because of its excellent optical property, low cost and easiness to handle.Using metallorganic C4H9SnCl3(MBTC) and CF3COOH(TFA) as precursors, F-doped tin oxide thin films with good optical and electrical properties have been deposited by APCVD method in the laboratory. The films thickness is about 286nm, the sheet resistance is 15.6 Q /D, the electrical resistivity is 4.46*10^ * cm and the visible transmissivity is about 87.4% with infrared reflection about 85.3%.The influence of the substrate temperature, F doping level, content of activator and anneal treating on the films' structure, composition and properties has been studied synthetically. The films prepared under 425 癈 is composed with amorphous SnOi and its sheet resistance is very high. With the substrate temperature's increasing, the degree of crystallization, film thickness increase and electrical resistivity, sheet resistance decrease obviously. When the substrate temperature is higher than 525 癈, the temperature's increasing is not of benefit to the films thickness and sheet resistance. The doping level has a strong influence on the films' electrical properties. When the doping level is low, the resistivity decreases with the doping level's rising and when the doping level is high, the resistivity increases with the doping level's rising. The content of activator(H2O) has a influence on the deposition rate of films. The resistivity decreases with the content's increasing in experiments. Anneal treating has different influence on the films' electrical properties. At lower treating temperature, treating time and treating atmosphere's influence on electrical properties are not obvious: at higher treating temperature, the sheet resistance increases with the treating temperature and the treating time's increasing because of O ion and Na ion's permeating into the films.Based on the above study, semi-industrial experimentation on line has been done in the float glass line. The experimentation shows that the result of laboratory study has s significant guiding effect, and the product's performance reaches designing object, part performances even are superior to foreign products'.