Preparation And Performance Of SnO₂ Thin Films On Glass

The SnO2 low-E glass prepared by spray pyrolysis have the advantages of low cost, fine bonding strength, high wearability and so on, and it holds great promise with the popularization of Low-E glass. In this paper, the transparent and conductive SnO2 thin films with excellent surface quality and optics electricity performances were prepared by spray pyrolysis on glasses. The mechanism of the thin films growth of spary pyrolysis was discussed and the effect of F and Sb on the performances of SnO2 thin films were also investigated. The UV-Vis spectrometer, XRD and microscope were adopted to analyze the optics performance, the crystal structure and surface quality of films respectively. The results were shown as follows:(1)The flow of the liquid, distance, temperature and speed of moving nozzle all have great effect on the electrical property and surface quality. The thin films had good quality when the flow of the liquid, distance, temperature and speed of moving nozzle were 1.2ml/s, 35cm, 430℃ and 2cm/s respectively.(2)The SnO2:Sb thin films have better electrical property, but the SnO2:F thin films have better optical performance than SnO2:Sb films. The SnO2:F+Sb thin films have better comprehensive performance.(3)The tested results showed that the thin films are smooth; the sheet resistance is 60Ω/□ and the resistivity is 2.1 × 10 3Ω·cm; XRD result indicated that the thin films are SnO2 with tetrahedral structure; The visible transmission of the coated glass is up to 80%; it's infrared reflectivity in 2500nm increased to 36% from 6% of the uncoated glass. The coated glasses have fine performances of temnerature preservation and heat insulation behavior, chemical stability, bonding strength and excellent acid-resistance and alkali-resistance.