Preparation Of SnO₂:Sb Film By Spray Pyrolysis Deposition And Its Performance Study

In this paper, a comprehensive introduction of low emissivity (Low-E) glass, including its development, energy saving characteristics, principle, types and preparation methods was described. The doped tin dioxide (SnO2) has promising prospects as the film materials of economical energy saving coating glass because of its excellent optical property, low-cost and easiness to handle. The spray pyrolysis technique has a great application potential to be a method to prepare the economical tin dioxide film for its unsophisticated equipment, low-cost and high deposition rate.In this paper, antimony-doped SnOa (ATO) thin films were deposited onto soda-lime glass by the spray pyrolysis method, using metal salts SnCh ?2H2O and SbCls as precursors. The resulting antimony doped tin dioxide thin film has good optical and electrical properties. The mechanism of the film formation in spray pyrolysis method was also discussed.The films were characterized by X-ray diffraction, scanning electron microscopy, atomic force microscopy, ultraviolet and visible transmittance spectroscopy X-ray photoelectron spectroscopy and so on.The sheet resistance can reach as low as 13.4 Q/D under optimum deposition conditions (Sb/(Sn+Sb) atomic ratio: 11%; substrate temperature: 500 癈). The carriers concentration is 8.22 X 1020cm"3 and the mobility is 6.25 cmW1 , and the visible transmittance is about 82% with infrared reflection(3000nm) 26% or so.The SEM photos shows that the morphology of the films depends on the spray parameter such as the liquid flow rate, gas flow rate and gas pressure. The substrate temperature also play an important role on the morphology of the films. The morphology changed from smoothness and evenness to having many small holes with an increase of the liquid and gas flow.A detailed analysis of the electrical properties of ATO thin films was carried out in order to investigate the Sb/Sn atomic ratio and substrate temperature's influence on the ATO thin film. A convictive explanation brought forward to illustrate the changing of the electrical ；properties of the ATO thin film in different conditions.It shows that the spray pyrolysis can effectively improve the optical and electrical properties of SnOi:Sb film with antimony doping .The analysis of the film formation mechanism will play an important role for the direction of preparation other Low-E films .