Study On Simulation Of Multi-DOF Micro-displacement Stage

In this paper, the design of flexure hinge is studied by advanced computer aided engineering software(CAD/CAE), and the mathematical model of flexure hinge is conducted by orthogonal experimental scheme and stepwise regression method. In addition, more precise model is built by neural network method, which validates the regression model.The system simulation of multi-DOF nano-displacement stage is studied and the static and dynamic models of micro-displacement are simulated. The static and dynamic characteristic models of stage are built by ANSYS, which analyses the displacement, stress, natural frequency and vibration model of stage. Furthermore, the influence of primary structural parameters on static and dynamic characteristic is analyzed by orthogonal experimental scheme comprehensively and the numerical results from experiment are regressed by stepwise regression method, thus the optimization regression equation is obtained. Meanwhile, the neural network model is built and validates the regression model.In order to validate the simulation result, a testing sample is machined by EDM and a set of testing equipments that connect force with displacement has been set up. The testing results verify the simulation results and it shows that the testing equipments is feasible.