Research On Micro Displacement Stage In Optical Probe Topography Measurement System

With development of micromaching and large scale integrated circuit, microoptic and other micro structure emerging, surface topography plays more and more important role of parts. Therefore, it is imperative to provide a optic-probe topography measurement system to measure not only non-continuous surface, but also surface topography and small dimension.The paper starts at the scheme of the optical probe topography measurement system, and analyze the design program of main parts. The micro-positioning focusing system actuated by piezo-ceramic has been studied.In the thesis, the design theory of flexure hinge is studied, the mechanical model on single flexure hinge under applied force and torque is established, static analysis studies the characteristic of flexure hinge and lays the foundation for design of micro motion stage. The stage is theoretically investigated and the structure of stage is discussed. On basis of the former research, two different stages are analyzed. Finally, Finite Element Analysis studies the characteristic of stage.Piezoelectric element is an ideal micro displacement element for micromanipulation system with high accuracy. Based on theoretical research of actuation mechanism, the polarization mechanism and the hysteresis nonlinearity of the piezo-ceramic are discussed. The characteristic of PZT is analyzed.Finally, the model of the micro displacement stage system is founded, feedback PID control are studied and experimented. Main achievements of the dissertation are summarized. The micro displacement and the further research work are put forward.