Nonlinear Calibration Of Piezoceramic Tube Scanner

The nonlinearity of piezo scanner can cause feature distortion in SPM images, sothe nonlinear calibration is researched in this paper.This dissertation provides a kind of calibration method in open loop. Firstly, mensurate the nonlinear curve of PZT by applying Michelson interference. Secondly, get the fit function of the nonlinear curve. Thirdly, gain the inverse function of the fit function. Fourthly, based on the inverse function, get the voltage data which can produce linear displacement. Finally, according to the voltage data, design SPM scanning program in order to make XY scanner work linearly.According to the calibration method above mentioned, this dissertation includes two main parts. The first one is the part of the design, which includes the design of the X-Y measuring equipment and scanning calibration software. This part exists in Chapter 2 and Chapter 3. In the second one, the data and result of the experiment are presented. The detail of this part of work is given in Chapter 4. The results of the experiment show that this method can effectively eliminate the image distortion which is caused by nonlinearity of piezotube.