Making And Studying Of A Multi-Degree-of-Freedom Micro-Actuator

The aim of this research is to design and assenble a Multi-Degree-of-Freedom Micro-Actuator , whose operation is mainly dependent on the shear strains developed by d31 of piezoelectric ceramics. The research work included as follows:First, a kind of Micro-Actuator made with five piezoelectric ceramic pieces was designed and assembled. An approximative and simplified physical model based on elastic mechanics and thinshell theory was established for theoretic analysis of the results of multi-dimensional movements of the actua:or.Second, PZT(Pb((Zr0.52Tio.48)O3), PZTS (Pb0.95Sro.o5(Zro.52Tio.48)O3) and PZTSM (Pbo.95Sro.o5(Zro.52Tio.48)O3+0.75mol%MnO2) powders were prepared by citrate-polymerization-combustion processing with nitrate and citric acid as raw materials. The dielectric and piezoelectric properties of PZT, PZTS and PZTSM ceramic were tested. To fulfill the request in properties from the apparatus, the rigid PZTSM was selected as the material for making the Multi-Degre ;-of-Freedom Micro-Actuator . In addition, the chemical reactions in the mixed solutions during the synthesis were studied .The effects of sintering temperature and polar zing voltage on the properties of PZTSM were studied. Thin ceramic pieces were prepared with semi-dry-press -molding, sintering at 1250 and lapping.Finally, the displacements of the assembled actuator under various applied voltages were measured. The relations betweer the voltages applied and the displacements were discussed.