Research Of Rotary Piezoelectric Micro-angle Actuator Control And Detection System

Micro-controlling and positioning technology is today's world research hotspot. It is also the key to Nano measurement and processing technology. With the development of science and technology, the need of high precision, high resolution and flexible controlled testing and driving system is urgent in electronics, optics, biology, manufacturing and many other technical fields. It is used directly or works with her instruments equipment to complete the research and application of high precision. These demands have greatly boosted the growth of displacement drive positioning system. In many fields of Nanotechnology, it is urgent need a angular displacement detection and drive positioning system which is characteristic as great trip and high resolution to achieve high precision positioning.The subject researches on angular displacement drive positioning technology. It studies drive-control and angle-detecting technology on base of the existing rotary piezoelectric micro-angle actuators and designs a multifunctional driving control and detection system. This system can provide drive signals which are different in waveform, frequency and amplitude. These different signals control the movement of piezoelectric actuator. This subject also use independent component to study out the drive power which owns high-precision, high stability.Piezoelectric micro-angle actuator uses the"principles of push-pull relay"and flexure hinge body design to achieve micro-displacement, and integrates circular grating angular displacement sensor to detect the movement of angular-displacement. The DSP chip is the core of the drive-control and angle-detecting system. It produces the output signals which frequency, amplitude and step can be adjusted to drive the actuator rotary and position. The topic also designs a piezoelectric ceramic drive power which can achieve high-voltage amplification with independent components. The power can undistortedly amplify the DSP output feeble signals in order to precisely drive piezoelectric ceramic which is used in the movement of actuators. The power has steady output voltage, linearity, output range and output drive capability meets the requirement, and it owns low static ripple.Setting up the system platform, creating drive power prototype and completing the debugging are on the base of the research and design. At the end of the subject search, it can reach a conclusion that the entire system has high repeatability after the process of testing drive-control and angle-detecting system.