Research On The Terminal Behaveior Modeling Of Micro Electro Mechanical System

Micro-electro-mechanical system (MEMS) is developed based on the micromation and intelligentization tide of science technology. It integrates microoptics, micromechanics, microchemistry, microbiology and etc to obtain the information and to deal with the information. At present, MEMS is widely applied in aviation, medical treatment equipments, communications and so on. To improve the traditional experimental approach by "straightforward trial and error", designers need simulation-tools to test the behavior of the microsystems to decrease the lost times. To execute the effective system simulation, compact device-model must be constructed. But there are still some incompleteness using current techniques to construct device-model.Terminal behavior device-modeling technique decomposes MEMS into simple devices, then constructs device-model with n terminals. This technique represents the system-physical characteristic and can applied on any MEMS. But MEMS can't be decomposed easily and the internal parameters can't be obtained . This paper designed FEM-terminal behavior device-modeling technique. It decomposed MEMS into some devices, then obtained the terminals and terminal parameters based on the device-behavior, at last got the relations between parameters using ANSYS. This technique represents device-behavior characteristic and also solves the problems that equipment circuit simulation is restricted by equipment components and the complex of the node simulation. The main research works as follows:(1) Analyzing the modeling and simulation of MEMS and the importance of system-modeling, pointing out the incompleteness of device-modeling.(2) Pointing out the problems lying in terminal behavior modeling technique, using ANSYS obtains the relations between parameters and constructing FEM-terminal behavior modeling technique. Researching the arithmetic of the coupling of electrics and machine.(3) Taking the electrostatic micropump for example, the micropump was divided into three function subsystems, inlet subsystem, micromember and outlet subsystem , using the electro-mechanical arithemetic to research the dynamic behavior of the micromember.