Research On The Key Primary Parameters Of Electrostatic Pump Characteris Characteristic Simulation

Micro-electro-mechanical system (MEMS) consist of micro-sensor, micro-actuator, control and signal processing circuit. MEMS is extension of micro-electronics technology. It connect micro-electronics with precision mechnical process technology, and unite micro-electronic,IC and mechanics to be a system. We can verify and compare at the stage from design to manufacture by modeling and simulation.which can optimize design of MEMS devices, verify the validity of manufacture and process.On the basis of country natural science fund " MEMS modeling and applictation basing on FEM terminal behavior " (authorization number: 50105020), we start our research. Equivalent circuit modeling technique decomposes MEMS into simple devices, then constructs device-model with a equivalent circuit. At last, equivalent circuit of systems is formed by connecting each device's equivalent circuit. This technique represents the system-physical characteristic and can applied on any MEMS. But, Finding equivalent circuits is very difficult, and equivalent devices are limited by SPICE library. We research the key foundational technology using ANSYS, and study the effect of various process parameters. The main research works as follows:1, Analyzing the macro-modeling of nodal macro-model, lumped network macro-model and HDL macro-model, pointing out the shortness of these methods.2, Deduing the two different methods of equivalent circuits: F-V, F-I. Equivalent circuit macro-model of mechanical-electrics coupling clamped-clamped beam is built using F-V, F-I methods. Also, we exhibit how to build a equivalent circuit of a fluid problem.3, The phenomena of electrostatically pull-in is a famous instable. we deduced close-form expression of electrostatically actuation pull-in voltage, and study the electrostatical pull-in phenomena of clamped-clamped beam4, Taking the electrostatic micropump for example, the micropump was analyzed by ANSYS. Static behavior and dynamic behavior was observed. Using sequentially coupled physics analysis, we set up physics environments to mechanics, electro-static and fluid, and calculate couple of three different fields. The effect of primary parameters were studied.