Study Of Dynamic Property And Optimization Rule Of Micro-pump

The micro-pump is the core part of the micro-fluid system, and it is a key micro device in the MEMS. It could broadly be applied in every science fields, which has an enormous market and development potential. It is not in the round that the dynamic properties research of the micro-pump, which absence the rules of the optimization and evaluation. The design of the high quality micro-pump can be ensured by the study of the dynamic property of the micro-pump and the rule of the optimization and evaluation in this dissertation.According to the status of the micro-pump research, the dynamical property of the micro-pump is analyzed by finite element method (FEM), and the FEM model and analysis flow of the micro-pump are founded, and the dynamic property analysis program using the parameter is developed by use of the ANSYS software in this dissertation. The correlative data of the dynamic property analysis is processed by the rough sets theory, and the information system of the optimization and decision-making is founded, and the reduced attribute and the optimization rule are performed, which the information system of the optimization and decision-making are expressed by the information table and the triangle matrix based on the genetic algorithm is used in the reduced attribute method and the combination and reduction are used in the rule of the optimization and decision-making. The dynamic property analysis and optimization rules of the thermal driven micro-pump are got by the extracting software of the dynamic property analysis and optimization rule of micro-pump, which is developed in the dissertation. It is indicated that the method is the feasibility and the correspond arithmetic and program is operable based on this instance. And it provides a general and impersonal evaluation rule for the optimization design of the thermal driven micro-pump products. It is a new method research that the dynamic analysis of the micro-pump and the acquirement of the optimization rule in the dissertation. Combine approach of FEM, rough set theory and GA is used to realize optimization rules of the micro-pump. The research result will make up the lacuna the limitation for optimization rules lack and establish base for micro-pump products optimization. At the same time, the software being developed will provide a prototype tool for the dynamic property analysis of the micro-pump and optimization evaluation. It will avoid the blindness and improve the efficiency.