| With the growing levels of integration of semiconductor products and microelectric technique, requirements for the technique of positioning precision are continuously increasing. This paper studies on the technique of positioning precision and presents a low-input & large motion range stage, which have important learning value and practical meanings. The study is funded by National Natural Science Foundation of China, and also supported by the Ministry of Education Key items foundation of Science & Technology and Natural Science Foundation in Guangdong Province.Optimal design of the micro-positioning stage with flexure hinges on structure is presented, the aim of research is to enlarge the motion range and enhance the positioning accuracy. The stage consists of a monolithic flexure hinge mechanism, PZT actuators and LVDT sensors. The paper describes the procedures of selecting parameters for optimal design. In particular, it presents a mathematical formulation of the optimization problem. The problem includes the constraints of natural frequency, maximum driving force, coupled inputs and geometry structure. The final design of the stage is also presented based on the solution of the optimization problem. At the same time, the coupled inputs of the stage are analyzed, the influences of the design parameters to the coupled inputs are also discussed, and the key parameters are identified, which is important to design a low-coupled inputs stage.The finite element simulation results indicate that the designed stage has total range of ±114.6μm and ±132.3μm along the X- and Y-axes, respectively, and the maximum yaw motion range of ± 5.1mrad, the natural frequency of it is 280.2Hz.
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