Development Of Z Axis And Its Driving System For A Nano-CMM

This project comes from "An important international (area) cooperate project by national science fund(50420120134): Research on Nano-CMM System and Key Technique. A structure developing of Z axis for a Nano-CMM will be described in this paper. And the drive and control system are also be studied. Firstly, refer to the domestic and foreign development state of CMM. And research of present CMM. As requirement, a new structure of Z axis was designed, in the structure, abrasive slide guide was designed, use Israel NANOMOYION HR2 ultrasonic motor as driver. The Z axis was designed as two parts, and these two parts were joined by a flexible hinge, when the upper part was driving by the motor, the lower part could be moving up and down. Because of the flexible hinge structure, the deflection of the upper part from libration of the motor and other factors would affect the moving precision of lower part little. The precision of Z axis lie on the lower part. In this paper, each part of Z axis will be described detailedly. Made static analysis for the Z axis structure using ANS YS software, then get the distortion of guide and Z axis under the effect of the Z axis weight and pretightening force. Make sure that the Z axis structure can satisfy the requirement.In this paper, also research driving characteristic and controlling ways of NANOMOTION ultrasonic motor, research driving characteristic of the motor under different modes. Write driving programs for controlling motor using Visual Basic langurage, controlling the output voltage and drive mode of AB2 driver box. Use PCI 7484 data collection card to provide controlling signal for the AB2 driver box. Then finished the structure design of Z axis and research of drive and control system.