Study Of Synthesis Optimization Design Method And CAD Prototype Tool For Micro-pump

With the development of micro electric mechanical system (MEMS), the configuration of micro-pump is becoming more complex and the markets demand and the variety of micro-pump is constantly increasing. Therefore, the traditional design method depended on experience cannot satisfy the requirements of high efficiency and high quality for micro-pump design, and it has become an inevitable trend that using new design and analysis method based on Computer Aided Design and Computer Aided Engineering(CAD/CAE)technique in micro-pump design. Nevertheless, the current systematic theories for MEMS design still not are perfectly established, and the correspondent design tools lag far behind the product development. To deal with the above-mentioned problems, the theories and approaches of the synthesis optimization system for micro-pump is studied and a prototype system is developed and demonstrated in this dissertation.The main research contents and achievements in this dissertation are as follows:(1) Based on the "tradition" and "object" MEMS design method, a new method of micro-pump synthesis optimization design is proposed by cooperating the finite element numerical simulation method with nonlinear regression method.(2) Based on the proposed micro-pump synthesis optimization method, and taking the thermal actuated micro-pump as an instance, the synthesis optimization design application is studied and certificated, which is as follows:1) The finite element model of thermal actuated micro-pump is established, resolved and verified, and a MAPDL program is developed based on the process, which is used for further verifying analysis.2) Many thermal actuated micro-pump instances with different parameter are...