Embed Pizeoceramic Drive And Control System Research

With the development of modern science and technology, more and more studies involve in the manipulation of micro objects. Demand for precise positioning systems with nanometer accuracy is increasing quickly for some precise missions such as microsurgery, ultra-precise machining and measuring, etc. Meanwhile, compare to the smaller scale of micro operation objects the whole system needs smaller outline too.Piezo actuator is a kind of ideal actuator for nano-positioning system. It owns exclusive excellent characters such as small size package, high resolution, free of self-heat and noise. But it shows significant hysteresis and creep when it is activated by a voltage control driver. This can be reduced by borrowing close loop feedback which cost great and make the system more complex. With charge driver the pizeo acuter works under ideal linear. But charge driver is lack of low frequency stability.To solve the problems above, this dissertation supported by the project of National Natural Science Foundation (NNSF): Research on Piezoceramic Micro-Actuator's Polarity Modeling and Controlling Method (code: 60274053) focuses on the research of driving and control technique of piezoceramic.The drivers based on voltage, current control had been designed with the high voltage amplifier as core component. By deeply analyzing the reason of the fault and optimizing the parameter of circuit, performance of drivers increased greatly and a new way based on compound driving had been proposed which reduce the fault of traditional driver. These drivers own high resolution, bandwidth and low frequency stability.To reduce the scale of system a embed controller had been introduced to replace the traditional computer system which takes weaker noise, smaller scale and power consume. The integrate controller fulfills whole function of computer without multi machine cooperating. Melting the designed driver and controller, a integrate pizeo control system funded. It gives the foundation of portable micro system based on pizeoceramic.A serial of unified experiments had been taken to verify the analyzing result of the dissertation with the embed control system. A conclusion about the relationship between circuit parameter of driver and performance of pizeo actuator had been given through the experiment result.All the evidences point that the new embed control system of pizeo actuator gets excellent performance. It can be used in both quick and stable positioning area. Still the embed control system contributes a lot for the research of smaller nano-positioning system based on pizeoceramic in the future.