In this paper, the large size high temperature superconducting (HTS) target materials were prepared by solid state method and sol-gel method. The prepared powders and target materials were tested and analyzed .The sol-gel method was better than solide state method by XRD,SEM,TEM and R-T curve analysis. For example, the sintering temperature was 50℃ lower than the latter, the technics was simpler, the powder purity was higher and the powder size was smaller, the compact of target materials was better, the critical transition temperature was higher and the transition width was smaller, etc.. So the powders prepared by sol-gel method was more suitable to prepare high quality superconducting target materials.In addition, yttrium-stabilized zirconia (YSZ) and YBCO sol were obtained by sol-gel method. YSZ thin films buffer layer were prepared by dipping-pull method, and YBCO thin films were prepared on YSZ films buffer layer. The structure of YSZ was good when the solution concentration was 0.35mol/L and it's viscosity was 1.8×103 Pa·s. Integrated cubic state structure of YSZ thin films was obtained when it was sintered above 800℃ and the film surface was uniform by XRD and SEM analysis. Electron diffraction showed that YBCO thin film on YSZ film buffer layer had YBa2Cu3O8 superconducting structure.
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