| The phenomenon of friction is get well with people's live and product. From the 1980s, atom-microscope and friction microscope came out, then the scientists found that the macro friction regularity was not suitable at the degree of atom, molecular and nano. This hints that friction research has entered a new stage in which friction is studied in sub-micro-level.With the micro electronics technology development, the micro Electro-mechanical-system (MEMS) has a rapidly developed, whose apparatus geometry dimension at the level of millimeter, the friction of them is between micro and macro. It is called micro-friction. Now the urgent problems needed to be solved in MEMS research is whether the macro friction regularity is suitable for micro-friction phenomena and what degree is the dimension of friction component in that area of micro-friction. Because of the development of MEMS, the explicit principle of micro friction is needed urgently, It has many practical need in micro-friction research.Under the guide of professor Hua Dong Yu ,I looked up many abroad and native essays and did many experimentation , a new micro friction surveyor's apparatus came out, it have many advantages such as high measure precision , cheaper than others products , reliability function and so on .There are four chapters in the thesis .the first chapter is micro friction surveyor's apparatus' totality design. The second is micro friction surveyor's apparatus' transducer and electronic protel test. The third is micro friction surveyor's apparatus' PWM electronic machinery test. The forth is test statistics' analysis.
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