Overtone Decelerating Device Research In The Big Travelling Nanometer Move Platform

This article research content is sub-topic of the FH—II big stroke nanometer move platform. Through measure to the FH—II big stroke nanometer move platform which developed of Harbin FengHua limited company , the platform appears reverse return trip is 0.029 mm~0.2 mm, also non-uniform situation. Therefore the guarantee that has not reverse return trip is technical bottleneck which this platform had to solve. At present,decelerating device use a level of overtones gear drive and a level of planetary transmission in the move platform, Through test the platform, return disparity of the decelerating device is oversized, this greatly affect the move platform'pointing accuracy.At theoretical analysis foundation to each kind of decelerating device ,think that only use the harmonic gear transmission, can obtain minimum return disparity possibily, also transmission ratio big, transmission progression few, weight light, transmission precision high.The harmonics gear decelerating device that this article research mainly revolves to obtain minimum return disparity harmonic gear transmission. The research core content is determine soft and rigid gear conjugation coefficient in harmonic gear transmission. Through technology analysis and research to harmonic gear transmission, soft and rigid gear use big conjugation coefficient to guarantee the request that has not lateral clearance, while also guarantee soft and rigid gear has not teeth profile intervention.Through design and calculation, determined soft and rigid gear conjugation coefficient, obtained teeth side clearance when soft and rigid gear mesh transmission. The teeth side clearance in the very small situation, can guarantee minimum return disparity of the harmonic gear transmission. This design also through determined soft and rigid gear's high precision and appropriate material that guarantees the harmonic gear transmission performance.