The Function Expansion And Data Processing Of Nanometer Phase-shifting Interferometer For Micro-surface Profile Measurement

The function of the nanometer phase-shifting interferometer for micro-surface profile measurement was extended. And the data processing was completed in this dissertation. The various methods used to measure the micro-surface topography were described. The means of information processing and large field view measurement were also summarized. The principle of phase-shifting interferometry was systematically analyzed, and the pretreatment was provided to the images collected. The hardware system of three-dimension scanning of interferometer was designed. Aimed at the images collected, the image mosaic arithmetic was produced based on the judgement of the existence of the characteristic points. The arithmetic was realized by software and extended the measurement range of the interferometer. The design of system software was completed, with the function of data collection, image mosaic, motor driving, image display and so on.Major work of this dissertation:1. The function of the image mosaic for nanometer micro-surface interferometer was extended. The hardware system of three-dimension scanning of interferometer was designed. The scanning precision of two-dimension horizontal system and the structure and precision of vertical PZT system were analyzed.2. The whole image was stitched by several part images through processing. The principle of image mosaic was introduced in detail, and every step in the mosaic procession was analyzed. Proposed own arithmetic of image mosaic, and displayed the result of mosaic.3. Provided pretreatment to interferograms. The methods of remove noises were described and compared. Aimed at this interferometer, the own arithmetic of removing noises was proposed.4. The idea of facing object was used in system software. According to the system requirement, design the module structure of the whole software, including data collection, micro-surface display, image mosaic and so on. Based on Windows operating system, Visual C++ 6.0 was used as developing plat. Adopt Matlab or Opengl, the micro-surface profile was displayed with the surface height and character.Major innovation of this dissertation:1. The three-dimension scanning system of phase-shifting interferometer...