Studies About Pressurization Of Cheanrooms

Pressurization is always critical in cleanroom technology. By the order of single cleanroom to multi-cleanrooms as a clean area, this article analyzed and discussed the suitable pressure of cleanroom, the air flow rate for pressure difference, affection of the pressure difference when a door being opened and closed, the pressure deviation of the clean area when air pressure in some rooms changed, at last cleanroom control system was categorized from a new point. The study methods of investigation, experiment and theory deduction as well as some software as Matlab were used. When deciding the pressure difference of a cleanroom, the wind and stack pressure should be taken into consideration. We can take actively control of the air flow rate for pressurization. A hybrid control strategy of pressure difference control and air velocity control was raised for the condition when a door being opened and closed. The pressure distribution of a clean area can be solved by using Matlab. Cleanroom control system was categorized by the different control method of supply air, return air, fresh air and exhaust air, and it is convenient for the design engineer to select.