The main body of the paper of the key technology with fine mechanics and the precision instrument—The micro-motion technique is an object of study. Having introduced micro-motion mechanism of straight line electric motor systems, micro-motion mechanism of mechanical drive systems,twisting systems , piezoelectric component and electrostrictive dyadic submicron systems, micro-motion mechanism of distortion of hot system, micro-motion mechanism of expansion and shrinkage systems , micro-motion mechanism of flexibility, inclusive submicron systems, Have set forth every system of principle , characteristic , application and present situation. Simultaneous main body of a book has set forth piezoelectric component and electrostrictive dyadic submicron systems and submicron friction drive mechanism driven ,the two kinds of micro-motion mechanism with the weight being studying as said or narrated above for the basis , having given it's the pertinent operating characteristic.Final, the main body of the paper having designed a set of micro-motion mechanism of machinery, having carried out precision analysis on the person and having given characteristic of system out by the experiment.
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