Research On 3-RRR Parallel Micro-Motion Stage And Error Analysis

With the development of a Planar 3-RRR parallel micro-motion stage, kinematic, structure optimization and precision of this stage is studied in this thesis. This micro-motion stage is constructed based on the compliant mechanism concept. It's a monolithic compliant mechanism utilizing flexure hinges. The micro-motion stage is actuated by three PZT stack actuators. The end-effector platform of the stage can translate along x, y-axis and rotate about the z-axis.In this thesis, inverse and direct position analysis of the 3-RRR micro-motion stage is derived based on the pseudo-rigid-body model(PRBM). As a linear, effective kinematic model, constant-Jacobian method and loop closeure theory are presented. Isotropy and workspace capacity are also discussed.The model of static, dynamic and flexure hinge stiffness matrix are formulated. Moreover, characteristics of PZT are investigated and measured by experiment. Especially, Preisach model method is derived to eliminate the hysteresis nonlinearity. Several defferent criteria are used to produce designs having optimum characteristics.In addition, the experiment of the micro-motion stage is designed and studied which calibrate the Jacobian matrix and present essential data for error analysis. Finally, Analyze the sources of error and evaluate the main error quantity based on experiment data and obtain the synthesis of all error.