An Analysis Of Mechanics Characteristics Of MEMS Torsion Micro Mirrors

Micro Electromechanical System is important to every developed country since middle of 1980s, MEMS is regarded as a new technology that can be applied in general application. MEMS (Micro Electromechanical System) is a micro device or a micro system which can mass-produce by micro-machining and it set micro sensor, micro machine, micro actuator, signal process and control circuit, interface, communicator in integration . MEMS technology can almost be applied in all industries, whose main objectives include micro driver, micro actuator, micro sensor. MEMS are trended to be applied in micro Optical, micro robot, micro pneumatic, micro hydraulic. Torsion micro mirror is a kind of micro optic device which is trended to be used in general applications along with the development of MEMS. Torsion micro mirror is mainly applied in modern optic communication, optic computing, projection display, high definition television.Two models, torsion model and torsion-bend couple model, were compared in this paper. By compared the results with the experimental results in the document, it showed that the coupling model was more rational. Based completely considering edge effects, the electrostatic force computation formulas were corrected, and the drive forces (torsions) were calculated by the corrected electrostatic force. Considered the edge effects, the drive items were complicated and their analysis expressions couldn't be derived. Therefore, numerical integration procedure was employed in this paper to calculate the drive items in the dynamics equations. It's proved that the numerical calculation method presented in this paper was accurate and could be used in actual arithmetic. In this paper the coupling model was adopted to analyze the affection of the edge effects on the static characteristics and pull in effects of the torsion micro mirrors, and the dynamic equations were solved by the iterative refinement Homogeneous Capacity High Precision Integration Method. In the step drive, the affect of the edge effects about the dynamic characteristics of the torsion micro mirror was studied and the main factors affected the edge effects were discussed in this paper. The affect of damp on the dynamic characteristics of the torsion micro mirror and the dynamic response of the torsion micro mirror in harmonic drive was simulated simply at last.