The Research Of High Precision Large Caliber Reflective Mirror Micro Drive Equipment

The subject relate to the paper roots in the control system of the Shenguang-III (SG-III) prototype facility, we mainly design and manufacture several suits of micro drive equipment, which are used to adjust the reflective mirror module of SG-III prototype facility. The SG-III prototype facility is a experiment facility that is applied for the Inertial Confinement Fusion(ICF). The electrical control reflective mirror is the last adjust equipment when the laser enter the final optics module. So the adjust precision of the reflective mirror directly affects the shooting quality.There are two categories about micro drive equipment in this paper. One of them is drove by the combination of AC servo electromotor and ball screws, which is connected with reflective mirror using column stagger flexible hinge. The other one is drove by AC servo electromotor and ordinarily precision screws, and the flexible hinge change to flat straight round flexible hinge. Flexible hinge is a special driver, it is using little distortion of flexibility material to transfer press and movement. In this paper, we design two types of flexible hinge, which are column stagger flexible hinge and flat straight round flexible hinge.The control system of the drive equipment includes the unity of the central console and control module. The console regards VC++6.0 as the tool, it can set pulse number and pulse speed, start and stop the electromotor. It even could control different motor in different mirror. Control system makes up of programmable controller, motor driver, motor, etc. The console controls PLC and the motor driver changes the pulse into right frequency. Then the pulse makes motor moved in small space.We conduct experiment with drive equipments in TM5 reflective mirror. The result indicates that all of them worked well, but the ordinarily precision screws appeared crawl phenomena when the step is 0.3μm, and ball screws is 0.1μm. This work will supply important references to the frame research of SG-III mainframe facility.