Research On Experiment System Of Three-dimensional Ultrasonic Radiance Force's Synthesize And Its Micro-manipulation Application

In order to satisfy the needs of the manipulation of the micro-component in Micro-Electro-Mechanical Systems (MEMS), combing with National Natural Science Fund "The technical research on remote manipulation of micro-components based on 3D controllable ultrasonic radiation force filed" (50375144) and National High-Tech R & D Program (863 Program) " The key technical research on 3D remote manipulation of micro-components based on ultrasonic radiation force" (2006AA04Z330) , based on analyzing the ultrasonic radiation force and its synthesized field of plane piston transducer, 3D remote manipulation of micro-components based on ultrasonic radiation force are proposed, then associating with machine micro-vision system, using central control unit by ARM and interface unit by FPGA, a three-dimensional ultrasonic radiation force field synthesize and its micro-manipulation application experimental system is developed, finally by using this system micro-manipulation experiment is practiced and the superiority is validated. The contents of this dissertation are presented as below:Chapter 1, a survey of important role of the research on micro-manipulation is given, the review of current status and future development trend of micro-manipulation technology is summarized, the feasibility and superiority of the micro-manipulation technology is based on ultrasonic radiation force is indicated clearly, and then the research content of this dissertation is presented and each chapter of this dissertation is arranged.Chapter 2, based on fundamental theory of acoustics, the sound field distribution of a plane piston transducer and the relationship between the sound field and radiation force are studied. Using ultrasonic wave synthetic theory, the sound field and radiation force potential distribution of two or more plane piston transducer placed different situation are established, then the feasibility of micro-manipulation using ultrasonic radiation force field are analyzed by MATLAB.Chapter 3, after the whole schedule design of the three-dimensional ultrasonic radiation force field synthesize and its micro-manipulation application experimental system is proposed, each function modules are analyzed in detail ,then combing with machine micro-vision system, a three-dimensional ultrasonic radiation force field synthesize and its micro-manipulation application experimental system is developed.Chapter 4, using the developed application experimental system of three -dimensional ultrasonic radiation force field synthesize, micro-manipulation experiment is practiced, then the feasibility and superiority are validated by comparing the experimental results with the theory .Chapters 5, the main conclusions of this dissertation are summarized and the prospect for the application of ultrasonic radiation force is put forward.