Research On Technologies Of Automatic Ultrasonic Micro-manipulation Based On Micro-Vision Feedback

The micro-manipulation technology, as a kind of key and common method applied in basic research, technology implementation, system design & development, and product integration & assembly in the field of MEMS, is paid more and more attention by all governments and scholars. In the last 30 years, numerous micro-manipulation methods based on different strategies have been studied and developed to step into a practical application stage by using manual and semiautomatic micro-manipulation modes. However, with great challenges of miniaturization of micro-objects, requirement of high precision, poor characterization of mechanical properties and difficulty of monitoring by naked eyes, the limitation of manual & semiautomatic micro-manipulation methods was clearly appeared and became a bottleneck of further development, batch production, high performance price ratio and practical application in MEMS, which is the urgent problem waiting to be solved. Hence, exploring new theories and mechanisms to develop automatic micro-manipulation technology is now the most basic and key topic in MEMS field.Therefore, the technology of automatic ultrasonic micro-manipulation based on micro-vision feedback was studied in this dissertation, which was supported by Key Project of Natural Science Foundation of Zhejiang Province "Research on theory and application of automatic 3D micro-assembly technology based on acoustic manipulation (No. Z1110393)". On the basis of completing the development of the high speed embedded micro-vision module based on PXI Bus as well as of endowing the ability of micro-vision feedback to the acoustic manipulation experiment platform existed in our laboratory, a kind of 2-D automatic micro-manipulation technology based on ultrasonic radiation force field was developed by utilizing the synthesis technology of multi-channel ultrasonic signal, the controlling strategy of phase adjustment and micro-vision feedback. It provides a general solution with self-owned intellectual property rights for the research and production of MEMS. The detailed contents of this dissertation as follow:Chapter 1, by discussing the role and status of micro-manipulation technology in MEMS and the development of national economy, the significance to conduct the research on automatic micro-manipulation technology was described. The research status of the micro-manipulation technology based on ultrasonic radiation force field was systematically summarized, its problems were observed and the research direction was pointed out. Chapter 2. according to the demands of functions and features of automatic ultrasonic micro-manipulation system based on micro-vision feedback. the general schemeof this system was designed by means of PXI bus as a transmitting bridge of information and using modular design strategy.Chapter 3. according to the general scheme, some key modules of this system including the multi-channel ultrasonic signal generator and the high speed embedded micro-vision module based on PXI Bus were developed.Chapter 4, key technologies of automatic micro-manipulation based on ultrasonic radiation force field were studied. Sub pixel accuracy to measure the position and pose of micro-objects was realized by studying the ultrasonic micro-manipulation technology based on phase adjustment and the accurate calibration technology for the object-sided telecentricity, and a kind of alterable step control strategy was also proposed. Then, the technology of automatic ultrasonic micro-manipulation based on micro-vision feedback was developed.Chapter 5, on the basis of completing the development of the multi-channel ultrasonic signal generator and the high speed embedded micro-vision module based on PXI Bus, an experiment platform with the ability of automatic ultrasonic micro-manipulation based on micro-vision feedback was integrated. Then, relative experiments were conducted by means of above platform and the results demonstrated the technology proposed in this dissertation is feasible and efficient.Chapter 6, the research results of this dissertation were summarized, and the future research works were also forecast.