Dynamic Analysis Of The Guideway For The Precision Working Stage

With MEMS and nano-measurement technology developed, the demands on displacement accuracy and dynamic characteristics of precision platform were higher and higher. These, such as high displacement resolution, positioning accuracy and precision stability, were required in guideway as an important component of strict mechanical system and dynamic behavior.Mainly based on some problems in Z-axis system of nano-CMM in laboratory, mathematics and vibration models were established for structure deformation of Z axis, and model analysis was used in structure of Z axis by ANSYS in this subject. Under small-displacement circumstances with different types of guides, in order to further study on the influence of dynamic characteristics towards precision instruments, especially the influence of some guides' characteristics, such as crawling with low speed, towards the smooth and accuracy in movement.Then,a kind of experimental system for studying characteristics of the precision guideway was designed. Under conditions of precise movement, the theoretical basis and experimental data were provided in testing and analyzing of experimental results, defining relationship between speed and friction, reducing systematic errors and improving accuracy of instruments. This is also an exploration to enhance the positioning accuracy of the Precision Workstations.