Research On The Correlative Technology Of Differential Confocal Microscopic Detection Experiment System

Due to the great characters, such as non-contact measurement, tomography for the 3D micro structure measurement. Differential Confocal Microscopic Technology has obtained more and more attention from the researcher in the precision measurement fields.A Differential Confocal Microscopy system was set up in this project, and the research work was focus on the optoelectronic detection circuit, aiming and triggering circuit and computer control system of the system. It is including the following content:Based on the analysis of the spectrum character of the axial resolution, the optoelectronic detection circuit was developed in this project, great property was obtained in this circuit, such as the high sensitivity, low phase distortion, and the depression of high frequency noise in the beam path.In order to remove the"dummy zero point", the high speed and accuracy aiming and trigging circuit is designed. Two optoelectronic detectors were employed in the system, the sum of detector signals was utilized to obtain the scope of true zero point, and final decision was made by the comparison and differentiating circuit. At same time, the fast speed of aiming and trigger was obtained by this method.The control program was developed by Visual C++, based on the windows system. For the piezoelectric ceramic driver control, periodicity movement mode and steps movement mode were developed. Based on ADVANTECH PCL-816 card, data acquisition function was developed.At last, the system was test by experimental methods, and the result demonstrates that the design was effective and correct. The signal of detector is excellent and the axial resolution curve was perfect, it means that the system offers great character for the high sensitive detection.