Detection Circuit Design For Electromagnetic Micromachined Gyroscope

Micromachined gyroscope is a main part of INS which combines the silicon process and machine manufacturing. Gyroscopes were widely applied in military affair and life. Exact measurement is the purpose of the gyroscope design and the sensitivity is affected by the detection circuit. By analysis the dynamical equations of the excitation mode, excitation circuit was proposed. A detection circuit based on the analysis of noise source was introduced. In this thesis, the method for eliminating the same-frequency noise was introduced, a band filter and a test platform was design, which promoted the development of micromachined gyroscope.