Structure Optimization And Detection Of Piezoelectric Micromachined Modal Gyroscope

Compared with the conventional gyroscopes or vibratory gyroscopes, the solid gyroscope has high resistance to the shock and has attracted many attention and large amount of both theoretical and experimental researches have been done. However, these works mainly focused on qualitative researches, and quantitative analysis and optimization of such gyroscope is still blank. This paper proposed a method to optimize the size and the way to drive a novel piezoelectric micromachined modal gyroscope.In this paper, quantitative indicators were firstly introduced to evaluate the modes and thus determine the best operational mode as well as the optimized size of the device. Besides, the same indicators were used to determine the size and configuration of the driving electrodes with which the operational mode can be efficiently actuated.The fabrication process of the device is given, and the performance indicator of the cutting machine as well as the way to install the device on the testing board is also introduced.The testing method of PMMG as well as the testing result was finally given. We applied a kind of phase locked loop driving circuit. Compared with the open loop driving circuit, the phase locked loop driving circuit solved the problem of the shift of the working resonance frequency caused by the environmental temperature, pressure, etc.