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Circuit Design And Test Technology Of Capactive Micromachined Gyroscop

Posted on:2011-07-10Degree:MasterType:Thesis
Country:ChinaCandidate:J M GuoFull Text:PDF
GTID:2132360308460887Subject:Computer application technology
Abstract/Summary:PDF Full Text Request
Micromachined gyroscope based on MEMS technology has the advantages of small size, light weight, low power consumption, high reliability and so on, and has broad application in many area. However, due to the processing technology as well as interface circuits limitation in our country, micromachined gyroscope's performance is poor, and still in research. In this paper, I research on 803 gyroscope designed independently by Beijing Microelectronics Technology Institute, by analyzing its structure and characteristics, exploring its interfacing circuit and design driving and test circuits. I also tested the gyro bare chips and researched on how to reduce the size of interfacing circuit board in further, preparing for gyro products transition.The main work show as follows:(1) Combined with theoretical I analyze the 803 micro-gyroscope's character, get the mathematical expression of the gyroscope's driving mode and test mode's sport law.(2) Research on the analysis and design of gyroscope driving circuit maily. Designed the open loop driving circuit using sine wave plus DC component. On the basis of open loop driving circuit, discussed the closed-loop driving circuit using PLL. Finally use Multisim simulate the main modules of the circuit.(3) On the basis of weak signal detection theory, designed the gyroscope angular velocity detection circuit. Focus on analyzing how to meet requirement of gyro band-pass filter circuit, so get a flat pass-band to reduce error. Focus on the implementations of synchronous demodulation circuit and compare differences between different implementations.(4) Proposed a gyroscope bare chip testing program, made driving test on gyro bare chip, got and verified the gyroscope parameters such as inherent frequency and Q value.(5) Adjusted the interfacing circuits by using PCB software Pads Layout 2007, relayout the circuit board to make it smaller, and finally debugged and verified the circuit board.
Keywords/Search Tags:micromachined gyroscope, driving circuit, test circuit, bare chip test, miniaturization
PDF Full Text Request
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