| Electromechanical integrated electrostatic harmonic drive system is a sort of micro generalized compound drive system. The harmonic deformation of flexible ring leads to the transfer and transform of motion. As an important component of the drive, the control system dominates the starting, stop, speed regulation, precision positioning, and so on. Compared to the traditional drive system, electromechanical integrated electrostatic harmonic drive is more dependent on control system in that more precision positioning and speed response are required. Therefore, the investigation of the control method and control theory for the drive is useful to the design, analysis and performance control.In this paper, operating principle of the electromechanical integrated electrostatic harmonic micro drive system is studied. Then, dynamic equations for the drive system are established and the open-loop control model of drive system is presented accordingly.PID control theory for electromechanical integrated electrostatic harmonic drive is presented. On the basis of classical PID control system designing, parameters of PID control system are optimized by the simplex method. Using Matlab/Simulink,performance comparison is completed for the system before and after optimization.The torques applied to the flexible ring are calculated for single phase and single pole pair electric field and three phase and single pole pair electric field, respectively. The torque characteristics are compared for the two drive modes. The voltage compensation control is discussed for torque fluctuations.The basic principle of nonlinear PID regulator made up of nonlinear tracking-differentiator and nonlinear PID is analyzed and applied in the control system of electromechanical integrated electrostatic harmonic micro drive. The Matlab/Simulink simulation results show that it can improve the static and transient stability effectively and increase the robustness of the control system, the good performance is obtained.
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