| Cutting heat and cutting temperature are important physical phenomena in the cuttingprocess. Most of the cutting heat is absorbed by cutting tool, work piece and discarded, exceptfor a small number of cutting heat is consumed by the surrounding medium. Cutting heatmakes their temperature rise, causes deformation of the work piece, affects the machiningquality, increases tool wear even cause machine tool thermal deformation in serious.Therefore, it is essential to measure the cutting temperature. The main methods used inmeasuring the cutting temperature at home and abroad are thermocouple method, artificialthermocouple method, semi-artificial thermocouple method, infrared imaging method and soon. It is difficult to accurately measure the transient temperature in the cutting processbecause the cutting temperature is constantly changing but traditional methods are restrictedby sensor response time and cutting temperature. To solve this problem, this paper developeda thin film cutting thermocouple temperature sensor, which integrates both cutting andtemperature measuring functions. It is possible that cutting temperature is measured quicklyand accurately by thin film thermocouple cutting temperature sensor.This paper selects cutting tool material of thin-film thermocouple temperature sensor,preparation of Silica insulation film, nickel chromium-nickel silicon thin film thermocoupleand Si3N4protection layer by DC pulse magnetron sputtering technique, property analysis onsilicon dioxide insulating film and nickel chromium-nickel silicon thermocouple film,simulation of the cutting process by DEFORM software, static and dynamic calibration ofthin-film thermocouple temperature sensor and doing field cutting tests.The thin film of thermocouple which is developed by DC magnetron sputtering canreduce the coating cycle and save the cost of experiments effectively. The thin film is denseand smooth and its components are close to the target. The temperature distribution of tipcutting tool is get by3D dynamic simulation using DEFORM software.The sensitivity ofthin-film thermocouple is67.4μV/°C by Static and dynamic calibration, linearity error is lessthan0.32%, the minimum time constant is0.042ms. The error is less than10%compare theresults of field cutting tests with simulation results. So it is reliable that the cuttingtemperature is measured by the thin film thermocouple. |