Design And Implementation Of The Micro-component Tensile Test System

With the development of MEMS, the micro-component mechanical property research is got attention to the researchers at home and abroad, but the present micro-component mechanical properties parameter date dispersivity is very big, even the most basic of the elastic modulus hasn't a consistent recognized result.When carries on the MEMS structural design, because lacks the essential data of micro-component mechanical property, it has not established an effective mechanical reliability design criterion, and this has hindered the MEMS development seriously. Therefore, this paper takes the micro-component mechanical property tensile testing as a breakthrough point, carries on the typical micro-component testing technique research, and the goal is thoroughly provides the theory instruction and the data support for MEMS structural design and process, then enhances the MEMS micro-component performance and reliability.On the basis of summing up the work of predecessors, this paper presents a design and build of a tensile testing system which is simple, reliably and measurement accuracy is high; and carries on single-crystal silicon specimen tensile testing experiment. This tensile testing system uses the piezoelectric ceramics actuator to drive the tensile specimen; uses the force sensor to examine force on the tensile specimen; uses the displacement sensor to examine displacement on the tensile specimen; uses micro-positioning stage to carry out the specimen installation and adjustment; uses the CCD measuring technique to carry on the real-time monitor; uses the data acquisition card and the image acquisition card obtaining testing data. Meanwhile, for the existence of creep and other unfavorable characteristics of piezoelectric ceramic actuator, the closed loop PID control algorithm research to be introduced; for force sensor has output displacement phenomenon, the entire tensile testing platform mechanical stiffness to be calibrated. Uses LabVIEW graphical programming language to compile micro-component tensile testing software, mainly includes data acquisition, data display and save, image capture, video capture, image calibration, image application and piezoelectric ceramic actuator closed-loop PID control programmes. Finally, five single-crystal silicon specimen tensile testing experiments are carried, obtains the specimen stress and strain, and calculates the single-crystal silicon specimen elasticity modulus average of 163.2±5 Gpa, compared with the existing single-crystal silicon tensile testing results, this paper testing results have basically the same data with the foreign scientific research institutions. At the same time, the dispersion phenomena of experimental data is analyzed, and the tensile testing system and control software are feasible, achieve prospective aim.