| The focus of this thesis is about the active vibration control of a micro-vibration platform. According to the demand of micro-vibration environment in real applications, a micro- vibration platform with symmetrically placed electromagnetic actuators is presented for the control of micro-vibration and a mathematical model of the micro-vibration platform is established for simulation of micro-vibration control with an adaptive method. The dynamics and control of the micro-vibration platform are studied by theoretical analysis, computer simulation as well as experiment.This thesis starts from the review of researches in micro-vibration control and then puts forward the main contents, which are stated as follows.1) A new scenario of micro-vibration platform is presented. The mechanical structure is designed according to the function requirements of the platform. Finite element models of the platform and the electromagnetic actuator are established to analyze the natural characteristics, which are further obtained by measurements.2) A mathematical model of the platform with finite DOFs is also established for control simulation. Velocity feedback control is simulated in the case of stochastic disturbances. The result shows that velocity feedback can suppress resonant responses effectively and therefore can be used in the control of micro-vibration platform.3) For harmonic disturbances, the adaptive algorithm - LMS is applied to active vibration control. Simulation is conducted in MATLAB and the control effect under multi-frequency disturbance is verified.4) An experiment is conducted for verification of the adaptive algorithm as well as the scenario in the control of micro-vibration. The control method used in the experiment is the Filtered-x LMS algorithm, which is embedded with tracking filters. The controller is realized on a DAQ by National Instruments. The experimental results show that the micro-vibration platform with adaptive algorithm can suppress vibration effectively.
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