In the Fab Plant,data retention evaluation is very important for product qualification. Optimization of process to data retention capability inprovement is a major work for process intergrity engineer of technology development team. Temperature accelerating factor is used during data retention checking to ensure 10 years life time under 85℃. Charge loss mechanisms match Arrenius formular. Active Energy should be a clue to find the failure causes about data retention. Experimental result is the real references for process optimization.Charge loss mechanisms of 180nm EPROM process can be divided into two categories: extrinsic and intrinsic. The data retention lifetimes are typically determined by accelerated high-temperature data retention bake and calculated with the known active Energy(Ea). |